发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 [Problem] Provided is a semiconductor device in which an electrode of a semiconductor element and an electrode of a metal substrate are directly bonded, wherein the semiconductor device has good yield, connection reliability, and mass producibility, and excellent heat dissipation. Also provided is a method for manufacturing the semiconductor device. [Solution] A method for manufacturing a semiconductor device in which electrode sections 2a, 2b of a metal substrate 2 are directly bonded to an electrode of a semiconductor element 1, wherein the method has: a groove formation step in which an electrode separation groove 3a is formed at a prescribed depth at an element mounting position 7 on one main surface of the metal substrate 2; an element mounting step in which the semiconductor element 1 is mounted on both sides of the electrode separation groove 3a; and a grinding step in which the metal substrate is ground from the rear-surface side of the one main surface of the metal substrate 2 to a position reaching the electrode separation groove.
申请公布号 WO2016021476(A1) 申请公布日期 2016.02.11
申请号 WO2015JP71607 申请日期 2015.07.30
申请人 CITIZEN ELECTRONICS CO., LTD.;CITIZEN HOLDINGS CO., LTD. 发明人 HIRASAWA, KOKI;MATSUMURA, KAZUKI;IINO, TAKASHI
分类号 H01L33/62;H01L23/12 主分类号 H01L33/62
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