发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
[Problem] Provided is a semiconductor device in which an electrode of a semiconductor element and an electrode of a metal substrate are directly bonded, wherein the semiconductor device has good yield, connection reliability, and mass producibility, and excellent heat dissipation. Also provided is a method for manufacturing the semiconductor device. [Solution] A method for manufacturing a semiconductor device in which electrode sections 2a, 2b of a metal substrate 2 are directly bonded to an electrode of a semiconductor element 1, wherein the method has: a groove formation step in which an electrode separation groove 3a is formed at a prescribed depth at an element mounting position 7 on one main surface of the metal substrate 2; an element mounting step in which the semiconductor element 1 is mounted on both sides of the electrode separation groove 3a; and a grinding step in which the metal substrate is ground from the rear-surface side of the one main surface of the metal substrate 2 to a position reaching the electrode separation groove. |
申请公布号 |
WO2016021476(A1) |
申请公布日期 |
2016.02.11 |
申请号 |
WO2015JP71607 |
申请日期 |
2015.07.30 |
申请人 |
CITIZEN ELECTRONICS CO., LTD.;CITIZEN HOLDINGS CO., LTD. |
发明人 |
HIRASAWA, KOKI;MATSUMURA, KAZUKI;IINO, TAKASHI |
分类号 |
H01L33/62;H01L23/12 |
主分类号 |
H01L33/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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