摘要 |
The present invention relates to a conveying robot including variable robot hands. The conveying robot operates six to eight robot arms individually, and loads and draws out the conveyed objects such as the substrates and wafers loaded on an upper and lower parts in a predetermined pitch unit at the same time using the robot arms. According to the present invention, the conveying robot comprises: a plurality of robot arms; a slider mounted on the robot arms to move to a front and a rear side in a reciprocating motion; a bridge connected to a slider, having a location variable block formed thereon; and robot hands mounted on the location variable block, moving in a horizontal and reciprocating motion within a predetermined range. Accordingly, the conveying robot is able to move individually the conveyed objects or at the same time, include a fast process flow by moving individually the conveyed objects or at the same time in the process continued in one direction or in an in-line process; and increases the process efficiency by reducing a process time. |