| 摘要 |
An ion source includes a magnetic field part and an electrode. One side of the magnetic field part facing an object is opened. The other side is closed. An inside magnetic pole is separated from an outside magnetic pole in the opened one side of the magnetic field part. A magnetic core is connected to the closed other side. The acceleration closed loop of a plasma electron is formed in the opened one side. The inside magnetic pole has a gas injection part. The gas injection part penetrates the inside magnetic pole and supplies a gas to the direction of the acceleration closed loop. An electrode is separated from the magnetic field part in the lower part of the acceleration closed loop in the magnetic field part. |
