LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

摘要

Invention provides extending the functional possibilities of a light source with laser pumping due to increasing its spatial and energy stability, brightness and the reliability under long-term operation whilst ensuring compactness of the device. The result is achieved due to the fact that a focused laser beam is directed into a region of radiating plasma from the bottom upwards: from the lower wall of a chamber to an upper wall of the chamber which is opposite said lower wall, and the region of radiating plasma is arranged close to the upper wall of the chamber. In embodiments of the invention, the focused laser beam is directed along a vertical axis of symmetry of the walls of the chamber, the region of radiating plasma is produced at an optimally small distance away from the upper wall of the chamber and predetermined radiation power is maintained via an automated control system.

主权项

1. A light source with a laser pumping, comprising: a gas filled chamber (1); a laser (2) for generating a laser beam (3); an optical element (4), focusing the laser beam; a region of radiating plasma (5) created in the chamber (1) on an axis (6) of a focused laser beam (7); and an optical system (8) for collecting plasma radiation and forming a plasma radiation beam (9), in which
the focused laser beam (7) is directed into the region of radiating plasma (5)) from a bottom upwards: from a bottom wall (10) of the chamber (1) to an opposite top wall (11) of the chamber (1), and the region of radiating plasma (5) is positioned at a distance from the top wall (11) of the chamber (1), which is less than a distance from the region of radiating plasma (5) to the bottom wall (10) of the chamber (1).