DEVICE AND METHOD FOR MANUFACTURING A DEVICE

摘要

In various embodiments a method of forming a device is provided. The method includes forming a metal layer over a substrate and forming at least one barrier layer. The forming of the barrier layer includes depositing a solution comprising a metal complex over the substrate and at least partially decomposing of the ligand of the metal complex.

主权项

1. A method of forming a device, the method comprising:
forming a metal layer over a substrate; and forming at least one barrier layer, the forming comprising:
depositing a solution comprising a metal complex comprising a central metal atom or ion and at least one organic ligand over the substrate; andat least partially decomposing the at least one organic ligand of the metal complex.