SELF-ASSEMBLED NANOSTRUCTURES INCLUDING METAL OXIDES, SEMICONDUCTOR STRUCTURES COMPRISING THEREOF, AND METHODS OF FORMING SAME

摘要

A self-assembled nanostructure comprises first domains and second domains. The first domains comprise a first block of a block copolymer material and an activatable catalyst. The second domains comprise a second block and substantially without the activatable catalyst. The activatable catalyst is capable of generating catalyst upon application of activation energy, and the generated catalyst is capable of reacting with a metal oxide precursor to provide a metal oxide. A semiconductor structure comprises such self-assembled nanostructure on a substrate.

主权项

1. A semiconductor structure comprising a self-assembled nanostructure on a substrate, the self-assembled nanostructure comprising self-assembled domains in a matrix, the self-assembled domains comprising at least a first portion and a second portion, the first portion comprising a first block of a block copolymer material and a first metal oxide, the second portion comprising the first block of the block copolymer material and a second metal oxide, the matrix comprising a second block of the block copolymer material and substantially without any metal oxide.