| 摘要 |
The present invention relates to a probe pin, a probe unit including a support portion supporting the probe pin, a method for manufacturing the probe unit, and a method for inspecting a substrate by using the probe unit. In order to realize a weight reduction, the probe unit comprises a probe pin (2) and a support portion (3) which supports the probe pin (2). The support portion (3) comprises: arms (11, 12) which are spaced apart to face each other and have a band shape; a holding portion (13) which holds base ends (21a, 22a) of the arms (11, 12); and the probe pin (2) which functions as a connection portion connecting front ends (21b, 22b) of the arms (11, 12). The support portion (3) constructs a four-bar linkage that permits linear or approximately linear movement of the probe pin (2). In each of the arms (11, 12), through-holes (H1a, H1b, H2a, H2b) are formed in a region slightly closer to a front end than the base end and a region slightly closer to the base end than the front end. Center portions (21c, 22c) between the through-holes function as each link constituting the four-bar linkage, and formation positions (P1a, P1b, P2a, P2b) of the through-holes function as joints in the four-bar linkage. |
