| 发明名称 |
Aberration Computing Device, Aberration Computing Method, Image Processor, Image Processing Method, and Electron Microscope |
| 摘要 |
An aberration computing device (100) includes a fitting section (48) for fitting line profiles of a diffractogram taken in radial directions to a fitting function and finding fitting parameters of the fitting function and a computing section (49) for finding at least one of an amount of defocus and two-fold astigmatism, based on the fitting parameters. |
| 申请公布号 |
US2016041064(A1) |
申请公布日期 |
2016.02.11 |
| 申请号 |
US201514706308 |
申请日期 |
2015.05.07 |
| 申请人 |
JEOL Ltd. |
发明人 |
Morishita Shigeyuki |
| 分类号 |
G01M11/02;H01J37/26 |
主分类号 |
G01M11/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An aberration computing device comprising:
a fitting section for fitting line profiles of a diffractogram taken in radial directions to a fitting function and finding fitting parameters of the fitting function; and a computing section for finding at least one of an amount of defocus and two-fold astigmatism, based on the fitting parameters. |
| 地址 |
Tokyo JP |
