| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid crystal substrate hold panel and a manufacturing method thereof in which stable low reflectance can be obtained over wide wavelengths of irradiation light, a stable double exposure prevention operation and an excellent exposure operation can be obtained, the reduction of facility costs and reflectance can be attained while dealing with reduction in weight and expansion in scale of a liquid crystal display, function reduction or failure of a substrate stage is prevented, and a low-reflectance liquid crystal substrate hold panel can be manufactured surely at low costs. <P>SOLUTION: A liquid crystal substrate hold panel is provided in which spray coating 12 comprised of a low-reflectance material is formed on a surface of a base material 11 and a support section 13 capable of holding a transparent or translucent substrate W is formed on a surface of the spray coating 12. The spray coating 12 is formed from a compound material (Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>-α%TiO<SB POS="POST">2</SB>) containing alumina and titania, and the spray coating 12 is formed in such a manner that the full reflectance on its surface becomes 9% or less over the range of light wavelengths of 360-740 nm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
