发明名称 METHOD FOR MAKING AN ELECTRICALLY CONDUCTING MECHANICAL INTERCONNECTION MEMBER
摘要 The method involves connecting a copper substrate (2) and an electrode to a cathode and an anode of an electrical generator to carry out electro deposition of a metal material on a surface of the substrate via pores of a porous membrane in alumina or ceramic. The membrane is dissolved to free brush shaped structures with wires (2a) having a sub-micrometric diameter. Partially controlled dissolution is carried out on the wires to reduce the diameter for increasing adhesion force exerted between the structures by interpenetration and entanglement of the wires when the wires are pressed. Independent claims are also included for the following: (1) a method for manufacturing a three-dimensional microelectronic device (2) a three-dimensional microelectronic device comprising microelectronic cards.
申请公布号 EP2218102(B1) 申请公布日期 2016.02.10
申请号 EP20080870576 申请日期 2008.10.24
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;UNIVERSITÉ PAUL SABATIER 发明人 SIMON, PATRICE;TABERNA, PIERRE-LOUIS;LEBEY, THIERRY;CAMBRONNE, JEAN PASCAL;BLEY, VINCENT;LUAN, QUOC HUNG;TARASCON, JEAN MARIE
分类号 B82Y10/00;B82Y40/00;H01L21/02;H01L21/60;H01L23/48;H01L23/49;H01L25/065;H01L29/41;H01R4/26 主分类号 B82Y10/00
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