| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum component capable of accomplishing both improvement of emissivity and suppression of an exhaust gas, and a method for producing the vacuum component. <P>SOLUTION: The vacuum component includes a base material 1 and a radiation layer 2. The base material 1 has a metallic surface 1a subjected to a blasting treatment and then to an etching treatment. The radiation layer 2 is laminated on the metallic surface 1a and consists of AlTiN. According to this construction, the metallic surface 1a of the base material 1 is in such a state that the fixing of blast particles B caused by a blasting treatment and the complication of the surface are reduced by the etching treatment. Thus, a discharged gas due to fixing of the blast particles B and the complication of the surface is restrained. Additionally, by roughening the metallic surface 1a with a blasting treatment and an etching treatment, a radiation ratio is improved in comparison with a case of laminating a radiation layer on a smooth metallic surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
