发明名称 有機ELデバイスの製造装置及び製造方法
摘要 Provided are a manufacturing device for an organic EL device and a method for manufacturing an organic EL device which easily allow for codeposition on a base material set on the outer periphery of a rotary roller. The manufacturing device according to the present invention comprises: a rotary roller having a base material set on the outer periphery; a plurality of deposition sources for discharging a vaporized material to be deposited on said base material; and a mixer for mixing the vaporized materials discharged from said plurality of deposition sources and discharging the mixed vaporized materials toward said base material. The mixer includes a nozzle which is movable to change a clearance from said base material and discharges the mixed vaporized material.
申请公布号 JP5856871(B2) 申请公布日期 2016.02.10
申请号 JP20120035162 申请日期 2012.02.21
申请人 日東電工株式会社 发明人 山本 悟;垣内 良平
分类号 H05B33/10;C23C14/24;H01L51/50 主分类号 H05B33/10
代理机构 代理人
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