表面欠陥密度が少ないＳＯＳ基板の製造方法,申请号JP20130172438-传众专利搜索

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发明名称	表面欠陥密度が少ないＳＯＳ基板の製造方法
摘要
申请公布号	JP5859496(B2)	申请公布日期	2016.02.10
申请号	JP20130172438	申请日期	2013.08.22
申请人	信越化学工業株式会社	发明人	秋山昌次;伊藤厚雄;飛坂優二;川合信
分类号	H01L21/02;H01L21/265;H01L27/12	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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