发明名称 不揮発性半導体記憶装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a nonvolatile semiconductor storage device which can improve writing characteristics without complicating a manufacturing process. <P>SOLUTION: A nonvolatile semiconductor storage device comprises: an annular floating gate arranged to surround a source region; and the source region arranged inside the floating gate and a drain region arranged outside the floating gate, which are formed annularly. Compared with a memory transistor of a nonvolatile semiconductor storage device in the past, a W length can be longer, and a current amount which is to be a source of hot carriers and a drain end region where hot carriers are easily generated can be increased by forming a memory transistor annularly. Increase in the number of generated hot carriers can improve writing characteristics. In addition, because a structure of a nonvolatile semiconductor storage device manufactured in the present embodiment can be manufactured by a nonvolatile semiconductor storage device manufacturing method in the past, the writing characteristics can be improved without increasing the number of manufacturing processes. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5856836(B2) 申请公布日期 2016.02.10
申请号 JP20110276298 申请日期 2011.12.16
申请人 セイコーインスツル株式会社 发明人 井上 亜矢子;津村 和宏;斎藤 直人
分类号 H01L21/336;H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/336
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