发明名称 測定装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a measuring device of a refractive index and a refractive index temperature coefficient usable in a wide wavelength band and capable of improving measuring accuracy with a simple configuration. <P>SOLUTION: The measuring device includes: a measuring light detector 11 for receiving a light flux reflected on a mirror surface 501a of a mirror slit 501 after a parallel light flux entered into a constant temperature bath 6 via a window 601, reflected on a first surface 701 of a wedge prism type sample 7, and then discharged out of the constant temperature bath 6 via the window 601 or a parallel light flux entered into the constant temperature bath 6 via the window 601, entered from the first surface 701 into the sample 7, reflected on the rear surface of a second surface 702, then discharged out of the sample 7 via the first surface 701, and discharged out of the constant temperature bath 6 via the window 601 returns to a collimator 5 to be condensed by a collimator mirror 502; and an analysis control unit 15 for carrying out rotational control of a sample rotation stage 8, and calculating the refractive index of the sample 7 on the basis of a relation between an output from the measuring light detector 11 and the rotational angle of the sample rotation stage 8 detected by a rotational angle detection unit 8a. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5857499(B2) 申请公布日期 2016.02.10
申请号 JP20110162842 申请日期 2011.07.26
申请人 株式会社ニコン 发明人 勝沼 淳
分类号 G01J3/02;G01N21/3563;G01N21/35;G01N21/41 主分类号 G01J3/02
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