| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric diffraction grating in which a diffraction grating is formed by using a piezoelectric film that can be moved and stopped at extremely high speed.SOLUTION: The piezoelectric diffraction grating includes a first electrode 12 formed on a first insulating film 11, a piezoelectric film 13 formed on the first electrode, a second electrode 14 formed on the piezoelectric film, a second insulating film 15 formed on the second electrode and the piezoelectric film, and a mirror film 16 formed on the second insulating film. A concavo-convex pattern is formed on a surface of the mirror film 16 by applying voltage between the first electrode 12 and the second electrode 14 to bend the piezoelectric film 13; and light is reflected on the mirror film 16 where the concavo-convex pattern is formed so as to change interference colors. |
