发明名称 GLASS COMPOSITION FOR SEMICONDUCTOR JUNCTION PROTECTION, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
摘要 Provided is a glass composition for protecting a semiconductor junction for forming a glass layer which protects a pn junction, wherein the glass composition for protecting a semiconductor junction is made of fine glass particles prepared from a material in a molten state obtained by melting a glass raw material which contains at least ZnO, SiO 2 , B 2 O 3 , Al 2 O 3 and at least two oxides of alkaline earth metals selected from a group consisting of BaO, CaO and MgO and substantially contains none of Pb, As, Sb, Li, Na and K, the glass composition for protecting a semiconductor junction containing no filler. According to the present invention, it is possible to manufacture a semiconductor device having high reliability using a glass material containing no lead. Further, a baking temperature at which a layer made of the glass composition for protecting a semiconductor junction is baked can be set further lower than a baking temperature at which a layer made of a conventional "glass material containing lead silicate as a main component" is baked so that a semiconductor device having an excellent switching characteristic can be manufactured.
申请公布号 EP2983197(A1) 申请公布日期 2016.02.10
申请号 EP20130844589 申请日期 2013.03.29
申请人 SHINDENGEN ELECTRIC MANUFACTURING CO., LTD. 发明人 ITO, KOJI;OGASAWARA, ATSUSHI;MUYARI, KOYA
分类号 H01L21/316;C03C8/04;H01L21/329;H01L29/47;H01L29/868;H01L29/872 主分类号 H01L21/316
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