Apparatus for manufacturing a mask

摘要

A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.

主权项

1. An apparatus for manufacturing a mask, the apparatus comprising:
a template having a design pattern; a correcting unit that divides an upper surface of the template into a plurality of regions, the correcting unit being connected to each of the regions to selectively correct a distorted region among the regions; a pressing unit that presses a polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and a curing unit that cures the mask pattern.