| 发明名称 | Infrared detecting element, method for manufacturing infrared detecting element, and electronic device | ||
| 摘要 | An infrared detecting element includes a recessed portion, a supporting section, and an infrared detecting section. A supporting section is located above the recessed portion such that a hollow space stands between the supporting section and the recessed portion. The infrared detecting section is provided on the supporting section and detects infrared rays. The recessed portion is covered with a water repellent film, and the supporting section is made of a material that has high rigidity compared to silicon and silicon oxide. | ||
| 申请公布号 | US9255845(B2) | 申请公布日期 | 2016.02.09 |
| 申请号 | US201514604076 | 申请日期 | 2015.01.23 |
| 申请人 | Seiko Epson Corporation | 发明人 | Miyashita Kazuyuki |
| 分类号 | G01J5/02;G01J5/34;G01J5/04;G01J5/00;H01L31/18 | 主分类号 | G01J5/02 |
| 代理机构 | Global IP Counselors, LLP | 代理人 | Global IP Counselors, LLP |
| 主权项 | 1. An infrared detecting element comprising: a recessed portion; a supporting section that is located above the recessed portion such that a hollow space stands between the supporting section and the recessed portion; and an infrared detecting section that is provided on the supporting section and detects infrared rays, wherein the recessed portion is covered with a water repellent film, and the supporting section is made of a material that has a rigidity higher than a rigidity of silicon or silicon oxide. | ||
| 地址 | Tokyo JP | ||