Plasma evaluation apparatus

摘要

The present invention provides a plasma evaluation system and method for evaluating plasma, including: a treatment target material and a weak current measurement unit including a resistor unit and a differential amplifier, wherein the treatment target material is connected to the weak current measurement unit via a treatment target side measurement terminal, the resistor unit of the weak current measurement unit is connected to a ground side of a plasma generation current source, and the system and method evaluate plasma by receiving plasma generated by a plasma treatment equipment with the treatment target material, measuring a current by measuring a voltage across resistors of the resistor unit through the differential amplifier, and measuring an output voltage of the plasma generation power source.

主权项

1. A plasma evaluation system, comprising:
a treatment target material; and a weak current measurement unit including a resistor unit and a differential amplifier, wherein the treatment target material is connected to the weak current measurement unit via a treatment target side measurement terminal, wherein the resistor unit of the weak current measurement unit is connected to a ground side of a plasma generation power source, wherein the plasma evaluation system is configured to evaluate plasma by receiving plasma generated by a plasma treatment equipment with the treatment target material, measuring a current of a voltage across resistors of the resistor unit through the differential amplifier, and measuring an output voltage of the plasma generation power source, and wherein the plasma evaluation system is configured to measure an output signal of the differential amplifier and a signal of a voltage by transmitting the signals through an analog optical converter and an optical fiber, converting the signals to electric signals at a light receiving unit, and inputting the electric signals to an analog-digital converter, or to measure an output signal of the differential amplifier and a signal of a voltage by inputting the signals to an analog-digital converter, further converting the signals to light to thereby transmit the signals through an optical fiber as electrically insulated data, and inputting the signals to another analog-digital converter.