Methods of forming a Field Effect Transistor, including forming a region providing enhanced oxidation

摘要

Methods of forming a Field Effect Transistor (FET) are provided. The methods may include forming a region that provides enhanced oxidation under a fin-shaped FET (FinFET) body.

主权项

1. A method of forming a Field Effect Transistor (FET), comprising:
implanting ions into a substrate comprising a fin-shaped FET (FinFET) body protruding from the substrate, such that the FinFET body overlaps a portion of an implanted region of the ions, wherein the FinFET body comprises opposite first and second sidewalls; recessing the substrate to remove portions of the implanted region exposed by the FinFET body and such that the FinFET body overlaps a remaining portion of the implanted region; forming an isolation layer on the substrate and on sidewalls of the remaining portion of the implanted region; and oxidizing the remaining portion of the implanted region to provide an oxidized region that laterally extends under the FinFET body a distance that comprises at least a majority of a width of the FinFET body, wherein the width comprises a distance from the first sidewall to the opposite second sidewall of the FinFET body.