发明名称 磁気抵抗効果素子及び磁気メモリ
摘要 The present invention makes it possible to inhibit an MR ratio from decreasing by high-temperature heat treatment in a magnetoresistive effect element using a perpendicular magnetization film. The magnetoresistive effect element includes a data storage layer, a data reference layer, and an MgO film interposed between the data storage layer and the data reference layer. The data storage layer includes a CoFeB film coming into contact with the MgO film, a perpendicular magnetization film, and a Ta film interposed between the CoFeB film and the perpendicular magnetization film. The CoFeB film is magnetically coupled to the perpendicular magnetization film through the Ta film.
申请公布号 JP5856490(B2) 申请公布日期 2016.02.09
申请号 JP20120010359 申请日期 2012.01.20
申请人 ルネサスエレクトロニクス株式会社 发明人 苅屋田 英嗣;末光 克巳
分类号 H01L21/8246;H01F10/16;H01F10/30;H01F10/32;H01L27/105;H01L29/82;H01L43/08 主分类号 H01L21/8246
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