| 摘要 |
PROBLEM TO BE SOLVED: To provide a package which can suppress adhesion of foreign matter, e.g. dust, to pellicle stored in a pellicle storage case during transportation of pellicle.SOLUTION: A package for pellicle storage cases includes a package box and a cushioning material which protects, within the package box, pellicle storage cases stored in the package box. The cushioning material has a support film which supports the upper or bottom surface of the pellicle storage case and is extendable and a frame body which is adhered with the support film in a spread form and is nearly polygonal in the plane view. The support film is fixed practically at least at positions, with at least the central part of one side of the frame body between them, and adhered in a spread form, at least on the side of the frame body. |
