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发明名称
半導体装置の製造方法
摘要
申请公布号
JP5853754(B2)
申请公布日期
2016.02.09
申请号
JP20120031333
申请日期
2012.02.16
申请人
住友ベークライト株式会社
发明人
和布浦 徹;中村 謙介;石村 陽二
分类号
H01L25/065;H01L21/60;H01L25/07;H01L25/18;H05K3/46
主分类号
H01L25/065
代理机构
代理人
主权项
地址
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