发明名称 半導体装置及び半導体装置の製造方法。
摘要 A semiconductor device includes a first semiconductor substrate, a second semiconductor substrate, a first main surface side of the first semiconductor substrate and a first main surface side of the second semiconductor substrate being bonded to each other; and a warpage correction layer which is formed on at least one or more selected from the first main surface side of the first semiconductor substrate, the first main surface side of the second semiconductor substrate, a second main surface side of the first semiconductor substrate, and a second main surface side of the second semiconductor substrate.
申请公布号 JP5853389(B2) 申请公布日期 2016.02.09
申请号 JP20110071043 申请日期 2011.03.28
申请人 ソニー株式会社 发明人 松谷 弘康;田渕 清隆
分类号 H01L27/146;B23K20/00;H01L21/02;H01L21/3205;H01L21/768;H01L23/522;H01L27/00 主分类号 H01L27/146
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