Parallel single substrate processing system with alignment features on a process section frame

摘要

A system for fluid processing substrate surfaces arrayed in a fluid having a process section with a frame having a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces and a substrate holder assembly having a number of substrate holders and configured for transporting substrates as a unit. The substrate holder assembly and each of the substrate holders are configured for removable coupling to the process section frame, each substrate holder configured to hold at least one of the substrates. The process section frame has alignment features disposed so that, on coupling of the substrate holder assembly with the process section frame, the alignment features interface with each substrate holder of the substrate holder assembly and locate each substrate holder in repeatable alignment, at corresponding coupling of each substrate holder and the process section frame, with respect to a predetermined feature of the process section.

主权项

1. A system for fluid processing one or more substrate surfaces arrayed in a fluid, the system comprising:
a process section including a frame and a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces; a substrate holder assembly having a plurality of substrate holders and configured for transporting a plurality of substrates as a unit between the process section and another location, the substrate holder assembly and each of the substrate holders being configured for removable coupling to the process section frame, each substrate holder in the substrate holder assembly being configured to hold at least one of the substrates, the plurality of substrate holders assembled as an array in the substrate holder assembly with each substrate holder spaced apart from each other in the substrate holder assembly; and a transporter configured to move the substrate holder assembly to and from the process section, the process section frame having alignment features disposed so that, on coupling of the substrate holder assembly with the process section frame, the alignment features interface with and directly contact each substrate holder assembled as the array in the substrate holder assembly and locate each substrate holder in repeatable alignment, at corresponding coupling of each substrate holder and the process section frame, with respect to a predetermined feature of the process section.