Method of making transmission electron microscope micro-grid

摘要

A method of making a transmission electron microscope micro-grid includes following steps. A carbon nanotube layer is provided, and the carbon nanotube layer includes a first surface and a second surface opposite to each other. A first metal layer is electroplated on the first surface and a second metal layer is electroplated on the second surface. A number of first through holes are formed by etching the first metal layer, and a number of second through holes are formed by etching the second metal layer, wherein the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes.

主权项

1. A method of making a transmission electron microscope micro-grid, the method comprising:
providing a carbon nanotube layer comprising a first surface and a second surface opposite to the first surface, wherein a plurality of apertures are defined in the carbon nanotube layer; electroplating a first metal layer on the first surface and electroplating a second metal layer on the second surface; and forming a plurality of first through holes in the first metal layer by etching the first metal layer and forming a plurality of second through holes in the second metal layer by etching the second metal layer, wherein the carbon nanotube layer is exposed through the plurality of first through holes and the plurality of second through holes.