发明名称 III族窒化物半導体発光素子およびその製造方法
摘要 The invention provides a Group III nitride semiconductor light-emitting device in which the strain in the light-emitting layer is relaxed, thereby attaining high light emission efficiency, and a method for producing the device. The light-emitting device of the present invention has a substrate, a low-temperature buffer layer, an n-type contact layer, a first ESD layer, a second ESD layer, an n-side superlattice layer, a light-emitting layer, a p-side superlattice layer, a p-type contact layer, an n-type electrode N1, a p-type electrode P1, and a passivation film F1. The second ESD layer has pits X having a mean pit diameter D. The mean pit diameter D is 500 Å to 3,000 Å. An InGaN layer included in the n-side superlattice layer has a thickness Y satisfying the following condition: −0.029×D+82.8≦̸Y≦̸−0.029×D+102.8.
申请公布号 JP5853921(B2) 申请公布日期 2016.02.09
申请号 JP20120213287 申请日期 2012.09.26
申请人 豊田合成株式会社 发明人 奥野 浩司;宮崎 敦嗣
分类号 H01L33/32;C23C16/34;H01L21/205 主分类号 H01L33/32
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