发明名称 透過電子顕微鏡
摘要 A transmission electron microscope in which a sample is positioned in a sample plane 9b comprises an objective lens 11b, a first projection lens system 61b having plural lenses, a second projection lens 63b system having plural lenses, and an analyzing system. The sample plane 9b is imaged into an intermediate image plane 71, a diffraction plane 15b of the objective lens 11b is imaged into an intermediate diffraction plane 67b, and either a) the intermediate image plane is imaged into an entrance image plane of the analyzing system and the intermediate diffraction plane is imaged into an entrance pupil plane of the analyzing system, or b) the intermediate image plane 71 is imaged into the entrance pupil plane 65b and the intermediate diffraction plane 67b is imaged into the entrance image plane 21b.
申请公布号 JP5855836(B2) 申请公布日期 2016.02.09
申请号 JP20110043279 申请日期 2011.02.28
申请人 カール ツァイス マイクロスコーピー ゲーエムベーハーCarl Zeiss Microscopy GmbH 发明人 ゲルト べナー
分类号 H01J37/26;H01J37/05;H01J37/141;H01J37/295 主分类号 H01J37/26
代理机构 代理人
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