Vertical-type heat treatment apparatus

摘要

A heat treatment apparatus and control method enabling the apparatus to settle down an internal temperature of a treating vessel to a target temperature accurately and quickly. The heat treatment apparatus includes a furnace body with a heater on an inner circumferential surface thereof, the treating vessel disposed inside the furnace body, a cooling medium supply blower and cooling medium release blower each connected to the furnace body, and a temperature sensor provided inside the treating vessel. A signal from the temperature sensor is sent to a heater output computing unit and blower output computing unit included in a controller. The heater output computing unit determines a heater output level based on a heater output numerical model and the signal from the temperature sensor. The blower output computing unit determines a blower output level based on a blower output numerical model and the signal from the temperature sensor.

主权项

1. A heat treatment apparatus comprising:
a furnace body; a heater provided on an inner circumferential surface of the furnace body; a treating vessel disposed inside the furnace body, the treating vessel forming a space between the furnace body and the vessel and internally accommodating a plurality of objects to be processed; a blower, connected to the furnace body via a cooling medium supply line, for supplying a cooling medium to the space formed between the furnace body and the treating vessel; an exhaust pipe connected to the furnace body; a furnace temperature sensor that detects internal temperature or external temperature of the treating vessel; and a controller that regulates the internal temperature of the treating vessel by controlling the heater and the blower in order to settle down the internal temperature of the treating vessel to a predetermined target temperature, wherein the controller includes: a numerical model relating to predetermined heater output and blower output levels; a heater output computing unit hat determines a heater output level based on the numerical model and the furnace internal temperature detected by the furnace temperature sensor; and a blower output computing unit that determines a blower output level based on the numerical model and the furnace internal temperature detected by the furnace temperature sensor; wherein the exhaust pipe includes an exhaust temperature sensor; and the controller further includes: an additional blower output computing unit that determines an additional blower output level based on a difference between a preset temperature and an exhaust temperature detected by the exhaust temperature sensor; and an integrated blower output computing unit that combines the blower output level determined by the blower output computing unit and the additional blower output level determined by the additional blower output computing unit.