发明名称 |
Metamaterial and method for forming a metamaterial using atomic layer deposition |
摘要 |
A metamaterial includes a first continuous layer formed with a first material by atomic layer deposition (ALD), a first non-continuous layer formed with a second material by ALD on first upper surface portions of a first upper surface of the first continuous layer, and a second continuous layer formed with the first material by ALD on second upper surface portions of the first upper surface of the first continuous layer and on a second upper surface of the first non-continuous layer. |
申请公布号 |
US9255328(B2) |
申请公布日期 |
2016.02.09 |
申请号 |
US201414200198 |
申请日期 |
2014.03.07 |
申请人 |
Robert Bosch GmbH |
发明人 |
Purkl Fabian;Provine John;Yama Gary;Feyh Ando;O'Brien Gary |
分类号 |
B32B3/02;C23C16/455 |
主分类号 |
B32B3/02 |
代理机构 |
Maginot Moore & Beck LLP |
代理人 |
Maginot Moore & Beck LLP |
主权项 |
1. A metamaterial comprising:
a first continuous layer formed with a first material by atomic layer deposition (ALD); a first non-continuous layer formed with a second material by ALD on first upper surface portions of a first upper surface of the first continuous layer; and a second continuous layer formed with the first material by ALD on second upper surface portions of the first upper surface of the first continuous layer and on a second upper surface of the first non-continuous layer. |
地址 |
Stuttgart DE |