发明名称 Metamaterial and method for forming a metamaterial using atomic layer deposition
摘要 A metamaterial includes a first continuous layer formed with a first material by atomic layer deposition (ALD), a first non-continuous layer formed with a second material by ALD on first upper surface portions of a first upper surface of the first continuous layer, and a second continuous layer formed with the first material by ALD on second upper surface portions of the first upper surface of the first continuous layer and on a second upper surface of the first non-continuous layer.
申请公布号 US9255328(B2) 申请公布日期 2016.02.09
申请号 US201414200198 申请日期 2014.03.07
申请人 Robert Bosch GmbH 发明人 Purkl Fabian;Provine John;Yama Gary;Feyh Ando;O'Brien Gary
分类号 B32B3/02;C23C16/455 主分类号 B32B3/02
代理机构 Maginot Moore & Beck LLP 代理人 Maginot Moore & Beck LLP
主权项 1. A metamaterial comprising: a first continuous layer formed with a first material by atomic layer deposition (ALD); a first non-continuous layer formed with a second material by ALD on first upper surface portions of a first upper surface of the first continuous layer; and a second continuous layer formed with the first material by ALD on second upper surface portions of the first upper surface of the first continuous layer and on a second upper surface of the first non-continuous layer.
地址 Stuttgart DE