| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component conveyance device and an electronic component inspection device that can prevent dew formation and freezing automatically and, if they occur, can remove dew and ice.SOLUTION: An electronic component conveyance device comprises a member constituting the device, a heating part for heating the member, a humidity detection part for detecting humidity, and a temperature detection part for detecting temperature. When the temperature detected by the temperature detection part is below the double of the dew point temperature, the member is heated. The humidity of the air in contact with the member is preferably lower than that of the air in contact with the humidity detection part. The temperature detection part is preferably arranged at the member.SELECTED DRAWING: Figure 6 |
