THERMOACOUSTIC DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a thermoacoustic device and a manufacturing method thereof.SOLUTION: A manufacturing method of a thermoacoustic device of the present invention includes: a first step of providing a substrate of the thermoacoustic device; a second step of forming a first electrode and a second electrode on a surface of the substrate; a third step of transferring a carbon nano-tube array from a growth substrate to the substrate of the thermoacoustic device and covering the first electrode and the second electrode with the same; a fourth step of etching the surface of the carbon nano-tube array with laser and partitioning the carbon nano-tube array into two regions; a fifth step of removing the carbon nano-tube array in a removal region, retaining the carbon nano-tube array in a retention region, and forming support elements in the first electrode and the second electrode respectively; and a sixth step of mounting a first carbon nano-tube film on the surface of the support elements and suspending at least a part of the first carbon nano-tube film by using the support elements.SELECTED DRAWING: Figure 4