| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater unit capable of improving the thermal uniformity of a heater (heater surface).SOLUTION: A heater unit 100 includes a heater 110 and a pair of electrodes 120. Each of the pair of electrodes 120 has a through-hole region 122-1 in which a through-hole 123 is provided extending along a direction intersecting with a vertical direction to a rear surface 112 of the heater 110, and the lower end BE of the through-hole portion 122-1 is provided within the range of 3 mm or more and 30 mm or less from the rear surface 112 of the heater 110.SELECTED DRAWING: Figure 4 |
