| 摘要 |
PROBLEM TO BE SOLVED: To appropriately correct a measurement error due to a quadrant projection regardless of an angle to be formed with an axial direction of a stylus and a contact direction with a measured work.SOLUTION: A shape measuring device including a copying probe 10 implementing a copying measurement by a tip sphere 14 coming into contact with a measured work (sphere B) provided in one end of a stylus 12 is configured to: detect, by a tip sphere displacement detection unit 11, a displacement of the tip sphere 14 of the copying probe 10; detect a displacement of a movement mechanism relatively moving the measured work (B) and the copying probe 10; calculate an angle &thetas; to be formed with a contact direction of the tip sphere 14 with the measured work (B) and an axial direction of the stylus 12; output a value in which the displacement of the tip sphere 14 detected by the tip sphere displacement detection unit 11 based on the angle &thetas; is corrected as a correction value; and add the correction value and the displacement of the movement mechanism to calculate a measurement value.SELECTED DRAWING: Figure 10 |
