| 摘要 |
PROBLEM TO BE SOLVED: To provide an etchant management device, an etchant management method, and a constituent concentration measurement method of etchant, capable of keeping and managing performance of oxalic acid system etchant substantially constant, and suppressing deposition of solid particles.SOLUTION: An etchant management device comprises: a conductivity meter 17 which measures a conductivity value of an etchant; a density meter 18 which measures a density value of the etchant; and replenisher feeding control means for controlling feeding of the replenisher to be replenished to the etchant on the basis of the correlation between oxalic acid concentrations and conductivity values of the etchant and the measurement results of the conductivity meter 17, and the correlation between dissolving metal concentrations and density values of the etchant and the measurement results of the density meter 18.SELECTED DRAWING: Figure 1 |
