发明名称 DIVIDING DEVICE FOR STUCK SUBSTRATE AND BREAKING BLADE
摘要 PROBLEM TO BE SOLVED: To provide a dividing device which can suitably divide a stuck substrate, and a breaking blade.SOLUTION: A dividing device has a breaking blade, which has a lengthwise direction along a scribe line. In the breaking blade, a tip thereof formed along the lengthwise direction is round chamfered, a scribe line is formed on one principal surface at a division planning position, and a protective layer is formed on the other principal surface. When the tip is brought into contact with a stuck substrate along a groove thereof which is provided on the protective layer in such a manner that an area of a predetermined width including the division planning position is exposed, the braking blade contacts only two end parts of the protective layer which are horizontally separated from each other with the division planning position interposed therebetween and form side parts of the groove part.SELECTED DRAWING: Figure 2
申请公布号 JP2016022737(A) 申请公布日期 2016.02.08
申请号 JP20150035536 申请日期 2015.02.25
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 TAKEDA MASAKAZU;MURAKAMI KENJI;TAMURA KENTA;HIDESHIMA MAMORU;HASHIMOTO TAICHI;KURIYAMA NORIYOSHI;ISOKAWA HISAJI
分类号 B28D5/00;C03B33/10;H01L21/301 主分类号 B28D5/00
代理机构 代理人
主权项
地址