| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a single crystal capable of reducing frequency at which dislocation of the single crystal occurs after transferring to a cone growing process by automating a drawing process in the floating zone melting method.SOLUTION: A manufacturing method of a single crystal by using the floating zone melting method includes: a fusing step of heating and melting a tip end part of a raw material rod 1 and thereafter, fusing the same to a seed crystal 2 attached to a crystal feeding mechanism; a drawing step of drawing a diameter of a single crystal 3 so as to be non-dislocated; a cone part forming step of growing the single crystal 3 while enlarging the diameter; and a straight barrel part forming step of growing the single crystal 3 while maintaining the diameter constant. Further, the drawing step includes: a drawing diameter control step of operating high-frequency current supplied to an induction heating coil 15 to perform PID control on the drawing diameter of the single crystal 3; and a drawing position control step of operating descending speed of the single crystal to perform PID control on the drawing position of the single crystal.SELECTED DRAWING: Figure 5 |
