发明名称 FLOW REGULATING VALVE AND PRESSURE CONTROL UNIT
摘要 PROBLEM TO BE SOLVED: To provide a flow regulating valve and a pressure control unit capable of keeping valve characteristics satisfactorily even if the temperature in a pressure-regulating chamber changes.SOLUTION: A flow regulating valve 70 is equipped with a valve body 71 and a valve seat 74, of which the valve body 71 is constituted by jointing a piezoelectric element 73 to a diaphragm plate 72. Moreover, the flow regulating valve 70 includes: a first cylindrical member 77 for supporting the valve seat 74 at one axial end; and a second cylindrical member 76 arranged on a radially outer side than the first cylindrical member 77 for supporting the valve body 71 at the one axial end. Moreover, the second cylindrical member 76 is made of a material having a linear thermal expansion coefficient different from that of a material constituting the first cylindrical member 77.SELECTED DRAWING: Figure 3
申请公布号 JP2016023701(A) 申请公布日期 2016.02.08
申请号 JP20140147778 申请日期 2014.07.18
申请人 AISAN IND CO LTD 发明人 KOBAYASHI MASAHIRO;HATA KATSUYUKI
分类号 F16K31/02;F16K7/14;F16K17/30;G05D16/16;G05D16/20;H01L41/09 主分类号 F16K31/02
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