ELECTRONIC COMPONENT CONVEYANCE DEVICE AND ELECTRONIC COMPONENT INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electronic component conveyance device and an electronic component inspection device that facilitate conveyance work and installation work after conveyance.SOLUTION: An electronic component inspection device 1 comprises an electronic component arrangement part where an electronic component such as an IC device is arranged and a cooling unit 300 arranged perpendicularly above the electronic component arrangement part for supplying refrigerant to the electronic component arrangement part. The cooling unit 300 is preferably arranged to position its center of gravity in an area other than a tester arrangement space A6 in a planar view.SELECTED DRAWING: Figure 2