SEMICONDUCTOR OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor optical element that includes a spot size converter and cladding layers in the spot size converter, having good consistency with cladding layers of an optical waveguide element to be integrated.SOLUTION: A semiconductor optical element 1 comprises: a substrate 2 including a first region 2A and a second region 2B sequentially arrayed in a direction of a first axis Ax1 from an end face 10A to be optically coupled to an external optical waveguide; a first semiconductor optical waveguide 10 provided on a principal surface of the substrate 2 and for a spot size converter; and a second semiconductor optical waveguide 20 provided on the principal surface of the substrate 2 and optically coupled to the spot size converter. The first semiconductor optical waveguide 10 is provided on the first region 2A, and the second semiconductor optical waveguide 20 is provided on the second region 2B. The first semiconductor optical waveguide 10 includes a core layer 12 and a cladding layer 13 extending in the direction of the first axis Ax1. The cladding layer 13 includes a first clad region 14, and a single auxiliary semiconductor layer 15 in the cladding layer 13.SELECTED DRAWING: Figure 1