| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact inspection device of an inspecting object that can inspect the inspecting object using a common member in a plurality of inspection processes different in loads to the inspecting object.SOLUTION: A contact inspection device is a device that comes into contact with an inspecting object to inspect the inspecting object, and in a first state where first inspection is performed to the inspecting object, comprises: a first substrate on which a plurality of first contactors coming into contact with the inspecting object are provided; a circuit conversion substrate to be attached to the first substrate; a second contactor that comes into contact with the circuit conversion substrate with a first load, and has a first contact to be electrically connected to the first contactor; a housing in which the second contactor is provided; a load adjusting member that is arranged between the housing and the circuit conversion substrate; and a second substrate on which the housing is attached, and wiring to be electrically connected to a second contact of the second contactor is provided. The load adjusting member is configured to adjust a load to be generated at the first contact of the second contactor to the first load from a second load greater than the first load.SELECTED DRAWING: Figure 1 |
