| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of plate-like workpieces to be processed per unit time without deteriorating a suction force in a processing device in which the plate-like workpiece, which is a processing object, is held by a chuck table.SOLUTION: A first pipeline 32 allows a first suction source 31 and a chuck table 11 to communicate with each other. A separator 33 is provided in the middle of the first pipeline 32 and separates a liquid mixed into a gas suctioned from the chuck table 11. Drain means 34 drains the liquid separated by the separator 33. The second pipeline 42 allows a second suction source 41 and a drain port of the separator 33 to communicate with each other. A non-return valve 43 is provided in the middle of the second pipeline 42 and blocks flow from the second suction source 41 side to the separator 33 side.SELECTED DRAWING: Figure 1 |
