| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS element capable of enlarging easily the volume of a back chamber.SOLUTION: Such a structure is adopted that, in order to support a movable electrode 3, the movable electrode 3 is clamped by an insulation member and a spacer 5 instead of clamping the end of the movable electrode by a silicon substrate 1 and the spacer 5, and further the insulation member is clamped by the substrate 1 and the spacer 5. Hereby, such a constitution is obtained that the substrate is retreated furthermore than hitherto, to thereby enlarge the volume of a back chamber.SELECTED DRAWING: Figure 8 |
