发明名称 |
DISCHARGE AMOUNT ADJUSTING METHOD OF NOZZLE AND DEVICE THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a droplet forming method, a droplet measuring method, and a droplet measuring system that are capable of shortening measuring time and securing measurement precision.SOLUTION: A droplet measuring method includes the steps of: discharging and coating S20 for discharging multiple droplets from at least a part of nozzles of a line head 9 onto a substrate 110 having a contact angle distribution; imaging S40 for imaging the droplets; correspondence table creating S60 for creating a correspondence table showing a correspondence relation between an inclination of a droplet surface at a position on a three-dimensional coordinate system and luminance information corresponding to the position, on the basis of luminance information obtained in the imaging step regarding at least a part of the droplets; and droplet evaluating S70 for obtaining a cubic volume or a surface shape of the droplets by using the luminance information and the correspondence table obtained in the imaging step S40.SELECTED DRAWING: Figure 2 |
申请公布号 |
JP2016022416(A) |
申请公布日期 |
2016.02.08 |
申请号 |
JP20140147552 |
申请日期 |
2014.07.18 |
申请人 |
PANASONIC CORP |
发明人 |
HIUGA RYOJI;MASUNAGA KEIJIRO;SUEMASU SATOSHI;UEDA HIDEJI;EJIMA TSUNEYUKI |
分类号 |
B05D1/26;B05C5/00;B05C9/12;B05C9/14;B05C11/00;B05C11/10;B05D3/00;H01L51/50;H05B33/10 |
主分类号 |
B05D1/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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