| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum film and a film deposition method therefor such that even when a film thickness is made thin, solar light condensed to have higher energy density never reaches a film-deposited member made of a resin material, and manufacturing cost can be made low by making the film thickness thin.SOLUTION: In a series of film deposition processes from the start to the end of film deposition, an aluminum film 1 is laminated and formed on a film-deposited member 10 made of a resin material by repeating a plurality of times of sputtering with a standby time interposed. Consequently, an aluminum film 1 is deposited which has a multi-layered structure comprising a first aluminum film 21 and a second aluminum film 22 having mutual border surfaces serving as a discontinuous plane 25 acting for light shielding and heat insulation.SELECTED DRAWING: Figure 2 |
