发明名称 POLISHING COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a polishing composition which can improve a polishing rate while achieving excellent surface quality.SOLUTION: There is provided a polishing composition comprising silica particles as abrasive grains, and a basic compound as a polishing promoter. A ratio of a total surface area A of the abrasive grains [m/kg composition] to a total volume B of the abrasive grains [m/kg composition] included in the polishing composition 1 kg, A/B, is 7.0×10or more.SELECTED DRAWING: None
申请公布号 JP2016023216(A) 申请公布日期 2016.02.08
申请号 JP20140147494 申请日期 2014.07.18
申请人 FUJIMI INC 发明人 TAKAHASHI SHUHEI;TOMATSU MASATOSHI
分类号 C09K3/14;B24B37/00;C09G1/02;H01L21/304 主分类号 C09K3/14
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