LAYOUT DESIGN SYSTEM, METHOD OF LAYOUT DESIGN AND COMPUTER-READABLE RECORDING MEDIUM COMPRISING PROGRAM FOR PERFORMING METHOD OF LAYOUT DESIGN

摘要

Provided are a layout design system, a layout design method, and a computer-readable recording medium comprising a program for performing a layout design method. The layout design method comprises: receiving predetermined values related to first to third normal fin designs extending in a first direction to be arranged in parallel in a second direction crossing the first direction; generating a dummy fin design based on the predetermined values; generating a mandrel candidate design based on the first to third normal fin designs and the dummy fin design; decomposing the mandrel candidate design into first and second mandrel mask designs; and generating a final mandrel design using one of the first and second mandrel mask designs, which satisfies predetermined conditions. The interval in the second direction between the first and second normal fin designs is different from the interval in the second direction between the second and third normal fin designs. The layout design system, the layout design method, and the computer-readable recording medium comprising a program for performing the layout design method, according to the present invention, assure product reliability.