SOLAR CELL AND THE MANUFACTURING MATHOD THEREOF

摘要

The present invention relates to a solar cell and a manufacturing method thereof. A solar cell according to an embodiment of the present invention comprises: a semiconductor substrate; a front electric field unit made of single crystal silicon which is located on the front surface of the semiconductor substrate; a tunnel layer located on the back surface of the semiconductor substrate; an emitter unit located on a side of a back surface of the tunnel layer; a back electric field unit located on a side of a back surface of the tunnel layer; a first electrode connected to the emitter unit; and a second electrode connected to the back electric field unit. The ratio of a resistance value of the front electric field unit to a resistance value of the back electric field unit ranges from 10: 1 to 3:1. In addition, a manufacturing method of solar cell according to an embodiment of the present invention comprises: a step of evaporation of the tunnel layer and an intrinsic semiconductor layer on the back surface of the semiconductor substrate; a step of implantation of impurities into a first area of the intrinsic semiconductor layer; a step of forming a diffusion barrier in the first area in the intrinsic semiconductor layer; a step of forming the front electric field unit on the front surface of the semiconductor substrate and of forming the back electric field unit and the emitter unit on the intrinsic semiconductor layer simultaneously by thermally diffusing the same doping source on the back and front surfaces of the semiconductor substrate; a step of etching simultaneously the front and back surfaces of the semiconductor substrate; and a step of forming the first electrode on the emitter unit and of forming the second electrode on the back electric field unit.