| 摘要 |
A distance measurement system is provided to automatically focus an inspection system camera to inspect a flat patterned surface. The system comprises: a pattern generator; an image sensor; optical elements; and a processor. The pattern generator projects a random pattern in a space to the flat surface on a tilted angle. The optical elements form an image of the pattern being reflected to the image sensor. The image sensor captures and forms spatially a random pattern image on the flat surface. The processor spatially processes the image of the random pattern and provides auto-focus information. |
